Northwestern Events Calendar

May
26
2016

“Advanced FIB Nanofabrication: New Ion Species and Unique Patterning Strategies”

When: Thursday, May 26, 2016
10:00 AM - 4:00 PM CT

Where: Technological Institute, Room L440, 2145 Sheridan Road, Evanston, IL 60208 map it

Audience: Faculty/Staff - Student - Post Docs/Docs - Graduate Students

Contact: Raymond Givens Bailey   (847) 467-3144

Group: NUANCE Center

Category: Training

Description:

Dr. Sven Bauerdick
Senior Product Manager
Raith

ABSTRACT
Focused Ion Beam (FIB) Nanofabrication is well-known for its unique capabilities and can become more advanced by combining it with a lithography platform. Being complementary to Electron Beam Lithography the key strengths of FIB are direct (resist-less) and 3 dimensional patterning. These can be employed for advanced prototyping and small batch production with the help of a true lithography architecture and will be proven by various applications. Moreover the wide range of techniques (resist, milling, deposition, etching, and functionalization) is even extended by newly developed focused ion beams beyond Ga including Si and Au. With these ion beams of diameters down to sub-10 nm and achieved features sizes of sub-20 nm the new ion species offer advantages like milling with reduced contamination or even functionalization by specific ion implantation. After introducing the technology behind and some basics of ion sample interaction, various application examples will be given. 3-D microfluidic devices, plasmonic arrays, fabrication of membrane devices (X-ray lens, nanopores) and selective growth of nanowires or graphene will be presented. Moreover new patterning strategies in particular for employing FIB techniques over areas larger than one single write field (field stitching and truly continuous writing) will be discussed.

NOON – Lunch will be provided for seminar participants

1:00pm,  2:00pm,  3:00pm,  4:00pm
Hourly Demo Sessions on the Raith Instrument (Limit 5 people for each demo session)

To sign up for a demo session, please contact Raymond Bailey (rgb@northwestern.edu) with your first and second choice for a time slot.

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