Description:

Mr. Atsushi Muto
Senior Application Engineer
Hitachi High Technologies America

BIOGRAPHICAL SKETCH
Mr. Atsushi Muto is a Senior Applications Engineer in the Nanotechnology Systems Division of Hitachi High Technologies America, Inc., and works from the Clarksburg, MD, office. In his current role, provides technical expertise, applications development and collaborative research activities. His research interests include FE-SEM system development, broad ion beam/focused ion beam applications and variable pressure electron microscopes. Mr. Muto had the opportunity to work for the NUANCE Center from 2007-08 as an invited scientist sponsored by Hitachi. He learned the latest application needs through active interactions with the NUANCE technical staff and users.

ABSTRACT
The Hitachi SU 8030 SEM is the highest performance scanning electron microscope in the EPIC facility. This talk will include a discussion and review of the imaging performance and capabilities of the microscope. This will include low voltage imaging utilizing beam deceleration, low voltage backscattered electron detection, and how to maximize imaging performance using the various detectors on the microscope. Sample preparation is also critical to quality results, we will discuss the latest in sample preparation techniques for UHR imaging. Finally, there will be an introduction to some of the latest applications in UHR FE-SEM being developed by Hitachi.

Refreshments will be provided.