Description:

Raith has advanced FIB instrumentation over the last fifteen years with the vision that nanofabrication has special requirements that should drive the development of FIB technology. Here, we present a new FIB-SEM nanofabrication instrument containing these essential components of EBL instrumentation, and review its FIBL applications in plasmonics and nanophotonics, including plasmonic arrays and zero mode waveguides for sensing biological molecules, solar absorber arrays, color center creation by maskless ion implantation, large area photonic structures in diamond, and metallic metasurfaces.